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Carbon Tetrafluoride CF4
Carbon Tetrafluoride CF4 Carbon Tetrafluoride CF4 Carbon Tetrafluoride CF4 Carbon Tetrafluoride CF4
Carbon Tetrafluoride CF4 Carbon Tetrafluoride CF4 Carbon Tetrafluoride CF4 Carbon Tetrafluoride CF4

Carbon Tetrafluoride CF4

    CAS No.: 75-73-0

    EINECS No.: 200-896-5

    UN No.: UN1982

    Purity: 99.999%

    Dot Class: 2.2

    Appearance: Colorless

    Grade Standard: Industrial Grade, Refrigerant Grade


Specification

99.999%

Oxygen+Argon

≤1ppm

Nitrogen

≤4 ppm

Moisture(H2O)

≤3 ppm

HF

≤0.1 ppm

CO

≤0.1 ppm

CO2

≤1 ppm

SF6

≤1 ppm

Halocarbynes

≤1 ppm

Total Impurities

≤10 ppm

Refrigerant:

Tetrafluoromethane is sometimes used as a low temperature refrigerant.

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Etching:

It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.

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Product

Carbon Tetrafluoride CF4

Package Size

40Ltr Cylinder

50Ltr Cylinder

T75 ISO Tank

Filling Net Weight/Cyl

30Kgs

37.5Kgs

/

QTY Loaded in 20’Container

240 Cyls

200 Cyls

Total Net Weight

7.2 Tons

7.5 Tons

Cylinder Tare Weight

52Kgs

55Kgs

Valve

CGA 580 / CGA 320 

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