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Nitrogen Trifluoride NF3
Nitrogen Trifluoride NF3 Nitrogen Trifluoride NF3 Nitrogen Trifluoride NF3 Nitrogen Trifluoride NF3
Nitrogen Trifluoride NF3 Nitrogen Trifluoride NF3 Nitrogen Trifluoride NF3 Nitrogen Trifluoride NF3

Nitrogen Trifluoride NF3

    CAS No.: 7783-54-2

    EINECS No.: 232-007-1

    UN No.: UN2451

    Purity: 99.99%-99.995%

    Dot Class: 2.2

    Appearance: Colorless

    Grade Standard: Electron Grade, Industrial Grade


Specification

≥99.99%

≥99.995%

CF4

≤50 ppm

≤40 ppm

N2

≤10 ppm

≤5 ppm

O2+Ar

≤5 ppm

≤5 ppm

CO

≤5 ppm

≤5 ppm

CO2

≤5 ppm

/

N2O

≤5 ppm

/

SF6

≤5 ppm

≤2 ppm

H2O

≤1 ppm

≤1 ppm

HF

≤1 ppm

≤1 ppm

Etching:

Nitrogen Trifluoride is used in the plasma etching of silicon wafers.

NF3

Material:

Nitrogen Trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD

NF3

Laser:

Nitrogen Trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers.

NF3

Product

Nitrogen Trifluoride NF3 Liquid

Package Size

44Ltr Cylinder

440Ltr Cylinder

ISO Tank

Filling Net Weight/Cyl

20Kgs

200Kgs

/

QTY Loaded in 20’Container

200 Cyls

20 Cyls

Total Net Weight

4 Tons

4 Tons

Cylinder Tare Weight

50Kgs

240Kgs

Valve

CGA/DISS640

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