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Silane SiH4
Silane SiH4 Silane SiH4 Silane SiH4
Silane SiH4 Silane SiH4 Silane SiH4

Silane SiH4

    CAS No.: 7803-62-5

    EINECS No.: 232-263-4

    UN No.: UN2203

    Purity: 99.99%-99.9999%

    Dot Class: 2.1

    Appearance: Colorless

    Grade Standard: Industrial Grade, Electronic Grade, Solar Grade


Component

99.99%

99.999%

99.9999%

Unit

Oxygen (Ar)

≤1

≤0.4

≤0.1

ppmV

Nitrogen

≤1

≤0.2

≤0.1

ppmV

Hydrogen

≤50

≤30

≤20

ppmV

Helium

/

≤10

≤10

ppmV

CO+CO2

≤0.2

≤0.4

≤0.1

ppmV

THC

≤0.2

≤0.2

≤0.1

ppmV

Chlorosilanes 

≤15

≤0.2

≤0.1

ppmV

Disiloxane

≤1

≤0.2

≤0.1

ppmV

Disilane

≤1

≤0.2

≤0.1

ppmV

Moisture (H2O)

≤1

≤0.2

≤0.1

ppmV

Electronic:

Silane is applied to polycrystalline silicon layers on silicon wafers when manufacturing semiconductors, and sealants.

SiH4SiH4

Solar:

Silane is used in solar photovoltaic module manufacturing.

SiH4

Industrial:

It is used in Energy-saving Green Glass and applied to vapor deposition thin film process.

SiH4SiH4

Product

Silane SiH4 Liquid

Package Size

47Ltr Cylinder

Y-440L

Filling Net Weight/Cyl

10Kgs

120Kgs

QTY Loaded in 20’Container

216 Cyls

8Cyls

Total Net Weight

2.2 Tons

960Kgs

Cylinder Tare Weight

52Kgs

680Kgs

Valve

CGA632/DISS632

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