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Tungsten Hexafluoride WF6
Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6
Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6 Tungsten Hexafluoride WF6

Tungsten Hexafluoride WF6

    CAS No.: 7783-82-6

    EINECS No.: 232-029-1

    UN No.: UN2196

    Purity: 99.999%

    Dot Class: 2.3

    A Pale Yellow: Colorless

    Grade Standard: Electron Grade,Industrial Grade


≥99.999%

CF4

<0.5 ppmV

B

≤10 ppbW

Ti

≤10 ppbW

O2

<0.5 ppmV

Ca

≤5 ppbW

Li

≤10 ppbW

N2

<1 ppmV

Cd

≤2 ppbW

U

≤0.05 ppbW

CO

<0.5 ppmV

Cr

≤10 ppbW

Zn

≤10 ppbW

CO2

<0.5 ppmV

Fe

≤10 ppbW

Si

≤10 ppbW

SIF4

<0.5 ppmV

Other Metal

≤500 ppbW

Pb

≤10 ppbW

SF6

<0.5 ppmV

K

≤5 ppbW

P

≤2 ppbW

HF

<5 ppmV

Mn

≤10 ppbW

Mg

≤10 ppbW

Al

≤10 ppbW

Na

≤5 ppbW

Ni

≤20 ppbW

As

≤10 ppbW

Th

≤0.1 ppbW

Cu

≤5 ppbW





Mo

≤10 ppbW

Semiconductor:

used in the production of semiconductor circuits and circuit boards through the process of chemical vapor deposition

WF6

Product

Tungsten Hexafluoride WF6 Liquid

Package Size

40Ltr Cylinder

Filling Net Weight/Cyl

50Kgs

QTY Loaded in 20’Container

240 Cyls

Total Net Weight

12 Tons

Cylinder Tare Weight

50 Kgs

Valve

CGA638/DISS638

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